ST.CERA Customized Alumina Ceramic Vacuum End Effector

Short Description:

This is a tray-type ceramic End Effector / Handling Arm used under a vacuum condition.

Ceramic End Effector / Handling Arm is “more heat-resistant”, “less deflective”, and “lighter” in weight as compared to the metal ones.

With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.

Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.