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ST.CERA Customized 99.5% Alumina Ceramic Loader Arm

ST.CERA Customized 99.5% Alumina Ceramic Loader Arm Featured Image
  • ST.CERA Customized 99.5% Alumina Ceramic Loader Arm
  • ST.CERA Customized 99.5% Alumina Ceramic Loader Arm
  • ST.CERA Customized 99.5% Alumina Ceramic Loader Arm
  • ST.CERA Customized 99.5% Alumina Ceramic Loader Arm

ST.CERA Customized 99.5% Alumina Ceramic Loader Arm

Short Description:

Ceramic End Effector / Handling Arm is installed on wafer handling robot or “end effectors” and used to carry silicon wafers into or out of cassettes or process chambers.
The benefits of using ceramics are reduction of deflection due to high flexural strength, resistance to high temperatures, and elimination of metal contamination and particles.


Product Detail

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Product Details

With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.

Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, the ceramic End Effector could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.

The ceramic End Effector with cavity can work in a high temperature of 800℃ due to unique ceramic bonding technology.

Here is the characteristics of alumina ceramic with different purity.

product parameters

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Material Data Sheet

Properties Unit Alumina (Al2O3)
99% Al2O3 99.5% Al2O3 99.8% Al2O3 99.9% Al2O3
Color — White Ivory Ivory Ivory
Density g/cm3 3.88 3.90 3.93 3.95
Water Absorption % 0 0 0 0
Grain Size μm 2~5 2~5 2~5 2~4
Flexural Strength MPa 350 360 361 350
Fracture Toughness MPa·m1/2 3~4 3~4 3~4 3~4
Vickers Hardness GPa 14 15.5 16 16
Young' s Elastic Modulus GPa 370 370 380 390
Thermal Conductivity W/m·k 28 32 32 34
Thermal Expansion Coefficient 10-6/℃ 7.2 7.2 7.2 7.2
Dielectric Constant — 9.5 9.6 9.6 9.9
Dielectric Loss Angle — 0.0001 0.0001 0.0001 0.0001
Dielectric Strength V/m 15×106 15×106 15×106 15×106
Specific Resistance Ω ·mm2/m ﹥ 1014 ﹥ 1014 ﹥ 1014 ﹥ 1014

Production process

Spray Granulation → ceramic powder → Forming → Blank Sintering → Rough grinding → CNC Machining → Fine Grinding → Dimension Inspection → Cleaning Packing

Essential details

Place of Origin: Hunan, China
Material: Alumina Ceramic
HS Code: 85471000
Supply Ability: 100 pcs per month
Lead time: 3-4 weeks
Package: Corrugated box, foam, carton
Others: Customization service available

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