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High Precision Ceramic Semiconductor Equipment Components
Formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation. Ceramics can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Alumina Ceramic Strip Insulating Ceramic Structural Components
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 400℃~800℃.
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Spare Parts for Mechanical Equipment of Alumina Ceramic Structural Components
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 400℃~800℃.
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High Precision and Complex Ceramics for Alumina Ceramic Structural Components
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 400℃~800℃.
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High-Temperature Resistant Precision Alumina Ceramic Structural Components
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 400℃~800℃.
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ST.CERA Customized Alumina Ceramic Plates Ceramic Parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 400℃~800℃.
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Alumina Ceramic End Effector Semiconductor Equipment Components
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere.
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ST.CERA Customized Semiconductor Precision Alumina Ceramic Bushing
Be made of high-purity (above 99.5%) alumina ceramic, formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Semiconductor Ceramic Focus Ring
Be made of high-purity (above 99.5%) alumina ceramic, formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized semiconductor Ceramic bushing
The critical process of semiconductor field requires to be done in cleanroom, especially for those devices should be used under conditions of high temperature, vacuum and corrosive gas. Ceramics can keep high stability in complicated physical and chemical environment.
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ST.CERA Customized semiconductor Ceramic focus ring
The critical process of semiconductor field requires to be done in cleanroom, especially for those devices should be used under conditions of high temperature, vacuum and corrosive gas. Ceramics can keep high stability in complicated physical and chemical environment.
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ST.CERA Customized semiconductor equipment Ceramic plate
The critical process of semiconductor field require to be done in cleanroom, especially for those devices should be used under conditions of high temperature, vacuum and corrosive gas. Ceramics can keep high stability in complicated physical and chemical environment.
