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ST.CERA Customized ESD Ceramic end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time
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ST.CERA Customized Alumina Ceramic gripping end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
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ST.CERA Customized Alumina Ceramic tray end effector
This is a tray-type ceramic End Effector / Handling Arm used under a vacuum condition.
Ceramic End Effector / Handling Arm is “more heat-resistant”, “less deflective”, and “lighter” in weight as compared to the metal ones.
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ST.CERA Customized Alumina Ceramic vacuum end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
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ST.CERA Customized 99.5% Alumina Ceramic Loader Arm
Ceramic End Effector / Handling Arm is installed on wafer handling robot or “end effectors” and used to carry silicon wafers into or out of cassettes or process chambers.
The benefits of using ceramics are reduction of deflection due to high flexural strength, resistance to high temperatures, and elimination of metal contamination and particles. -
ST.CERA Customized 99.5% Alumina Ceramic tube
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
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ST.CERA Customized 99.5% Alumina Ceramic rod
Be made of high-purity ceramic powder, the ceramic rod is formed by dry pressing or cold isostatic pressing, sintered under high temperature, then precision machined. With many advantages like abrasion resistance, corrosion resistance, high hardness, high toughness and low friction coefficient, it is widely used in medical equipment, precision machinery, laser, metrology and inspection equipment. It can work in the conditions of acid and alkali for a long time, and the maximum temperature can up to 1600℃. The ceramic materials we usually use are Zirconia, 95% ~ 99.9% Alumina (Al2O3), Silicon Nitride (Si3N4), Aluminum Nitride (AlN) and so on.
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ST.CERA Customized semiconductor Ceramic bushing
The critical process of semiconductor field requires to be done in cleanroom, especially for those devices should be used under conditions of high temperature, vacuum and corrosive gas. Ceramics can keep high stability in complicated physical and chemical environment.
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ST.CERA Customized semiconductor Ceramic focus ring
The critical process of semiconductor field requires to be done in cleanroom, especially for those devices should be used under conditions of high temperature, vacuum and corrosive gas. Ceramics can keep high stability in complicated physical and chemical environment.
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ST.CERA Customized AlN ceramic plates ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. Be made of high-purity ceramic powder, the ceramic parts is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries.
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ST.CERA Customized 99.5% Alumina Ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries with its features like high temperature resistance, corrosion resistance, abrasion resistance and insulation.
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ST.CERA Customized semiconductor equipment Ceramic plate
The critical process of semiconductor field require to be done in cleanroom, especially for those devices should be used under conditions of high temperature, vacuum and corrosive gas. Ceramics can keep high stability in complicated physical and chemical environment.
