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Alumina Wafer Handling End Effector Semiconductor Ceramics
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere.
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Alumina Anti-Static Ceramic End Effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Customized CNC Machining of St.Cera Ceramic End Effector
ST.CERA offers a vacuum ceramic End Effector / Handling Arm with a built-in hollow channel. We specialize in a technique that forms a vacuum air channel inside a single piece of material without using adhesive.
There is no risk of contaminant, outgassing, or particles. ST.CERA’s vacuum End Effector / Handling Arm with built-in channel are durable and can be used at high temperatures. Moreover, our manufacturing cost can be reduced by eliminating unnecessary assembly.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized 99.5% Alumina Ceramic Components
Be made of high-purity ceramic powder, the ceramic components is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries with its features like high temperature resistance, corrosion resistance, abrasion resistance and insulation.
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Alumina Ceramic End Effector Semiconductor Equipment Components
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere.
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ST.CERA Customized Alumina Ceramic End Effector Wafer Handling
ST.CERA offers ESD coating and ESD ceramic material End Effector / Handling Arm with a built-in hollow channel. We specialize in a technique that forms a vacuum air channel inside a single piece of material without using adhesive.
There is no risk of contaminant, outgassing, or particles. ST.CERA’s vacuum End Effector / Handling Arm with special coating technology is electrical insulated. We can also provide ESD ceramic material that is electrical insulated without any coating.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃. -
ST.CERA Customized 99.5% Alumina Ceramic Tubes and Ceramic Rods
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Alumina Ceramic Vacuum End Effector
This is a tray-type ceramic End Effector / Handling Arm used under a vacuum condition.
Ceramic End Effector / Handling Arm is “more heat-resistant”, “less deflective”, and “lighter” in weight as compared to the metal ones.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Semiconductor Precision Alumina Ceramic Bushing
Be made of high-purity (above 99.5%) alumina ceramic, formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Semiconductor Ceramic Focus Ring
Be made of high-purity (above 99.5%) alumina ceramic, formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Alumina Ceramic End Effector
ST.CERA offers ESD coating and ESD ceramic material End Effector Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized 99.5% Alumina Ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. Be made of high-purity ceramic powder, the ceramic parts is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries with its features like high temperature resistance, corrosion resistance, abrasion resistance and insulation.
