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High Purity Alumina Ceramic Tube and Rod
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
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ST.CERA CNC Machining of Customized High-Purity Alumina Ceramic Rod
Be made of high-purity ceramic powder, the ceramic tube is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. With many advantages like abrasion resistance, corrosion resistance, high hardness, high toughness and low friction coefficient, it is widely used in medical equipment, precision machinery, laser, metrology and inspection equipment. It can work in the conditions of acid and alkali for a long time, and the maximum temperature can up to 1600℃
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ST.CERA Precision Alumina Zirconia Ceramics With Various Tube and Rod Shapes
Be made of high-purity ceramic powder, the ceramic tube is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. With many advantages like abrasion resistance, corrosion resistance, high hardness, high toughness and low friction coefficient, it is widely used in medical equipment, precision machinery, laser, metrology and inspection equipment. It can work in the conditions of acid and alkali for a long time, and the maximum temperature can up to 1600℃
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High temperature Abrasion-Resistant Alumina Ceramic Rod
Be made of high-purity ceramic powder, the ceramic tube is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. With many advantages like abrasion resistance, corrosion resistance, high hardness, high toughness and low friction coefficient, it is widely used in medical equipment, precision machinery, laser, metrology and inspection equipment. It can work in the conditions of acid and alkali for a long time, and the maximum temperature can up to 1600℃.
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Ceramic Mechanical Components for Special Equipment
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere
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Alumina Ceramic End Effector Wafer Handling
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Alumina Ceramic Robotic Arm with Wear-Resistant and High Hardness
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere
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Wafer Handling Ceramic Arm Precision Ceramic Complex Shapes
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere
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Insulated Alumina Ceramic Arm Semiconductor Equipment Components
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere
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Precision Ceramic Alumina Ceramic Wafer Handling Arm Semiconductor Ceramics
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Alumina Ceramic End Effector Ceramic Arm
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Wafer handling of Ceramic End Effector
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere.