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Alumina PVD Insulation Ring for Physical Vapor Deposition Systems
St.Cera’s PVD insulation ring is manufactured from 99.8% high-purity alumina (Al₂O₃) for use in physical vapor deposition (PVD) systems. The ring provides electrical isolation between chamber components, preventing arcing and ensuring stable plasma operation. Key properties include high dielectric strength (15×10⁶ V/m), specific resistance >10¹⁴ Ω·mm²/m, and thermal stability up to 1600°C. Our precision machining capabilities achieve outer diameters up to 600mm, inner diameters down to 0.2mm, flatness of 0.003mm, and surface finish Ra0.1. The ring’s zero porosity and chemical inertness ensure long-term reliability in aggressive sputtering environments.
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Alumina Ceramic Parts for E-Gun Evaporation Systems
St.Cera manufactures high-purity 99.8% alumina ceramic components specifically designed for electron beam (E-gun) evaporation systems. These parts include crucible liners, beam deflector shields, insulators, and mounting fixtures. The material offers high dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and excellent resistance to thermal shock and chemical attack from evaporated materials. Our precision machining capabilities achieve complex geometries with minimum feature size 0.2mm, flatness 0.003mm, and surface finish Ra0.1. Each part is 100% CMM inspected for dimensional accuracy.
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Large-Format Alumina Ceramic Plate for Semiconductor & Industrial Fixtures
St.Cera manufactures large-format ceramic plates from 99.8% high-purity alumina (Al₂O₃) with maximum dimensions up to 1500mm in length and 600mm in width. Our precision grinding capabilities achieve flatness of 0.003mm over 100mm and parallelism of 0.002mm, ensuring consistent surface quality for large-area applications. Thickness up to 100mm, surface finish down to Ra0.1. These plates serve as vacuum chuck bases, heater platens, electrical insulation panels, and process chamber floors in semiconductor, display, and photovoltaic manufacturing. Through-holes, counterbores, and edge profiling available.
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Precision Alumina Ceramic Ring for Sealing, Insulation & Fixturing
St.Cera’s ceramic ring is precision machined from 99.8% high-purity alumina (Al₂O₃) for applications requiring high wear resistance, electrical insulation, and thermal stability up to 1600°C. Our manufacturing capabilities support outer diameters up to 600mm, thickness up to 100mm, and inner diameters as small as 0.2mm, with flatness of 0.003mm, parallelism of 0.002mm, and concentricity of 0.01mm. Available as seal rings, spacer rings, retaining rings, or custom profiles. The material’s zero porosity and chemical inertness make it suitable for aggressive chemical and plasma environments.
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High-Purity Alumina Ceramic Tube for High-Temperature & Corrosive Environments
St.Cera’s ceramic tube is manufactured from 99.8% high-purity alumina (Al₂O₃), offering excellent thermal stability up to 1600°C, high dielectric strength (15×10⁶ V/m), and superior chemical resistance. Our precision machining capabilities enable inner diameters as small as 0.2mm, outer diameters up to 600mm, and lengths up to 1500mm, with straightness of 0.005mm, concentricity of 0.01mm, and surface finish of Ra0.1. The tube’s zero porosity (0% water absorption) prevents outgassing in vacuum environments, making it ideal for semiconductor diffusion furnaces, thermocouple protection, and chemical processing. Custom wall thicknesses and end configurations (flat, tapered, flanged) are available.
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Custom Alumina Ceramic Parts for Semiconductor & Industrial Equipment
St.Cera manufactures custom ceramic parts from 99.8% high-purity alumina (Al₂O₃) according to customer drawings. Our facility is equipped with precision grinding machines and CNC machining centers, enabling the production of complex ceramic components with high precision. Typical parts include insulators, bearing balls, seal rings, bushings, custom fixtures, and complex geometries. Our manufacturing capabilities support
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Alumina Ceramic Nozzle for High-Temperature Gas/Fluid Injection
St.Cera’s ceramic nozzle is precision machined from 99.8% high-purity alumina (Al₂O₃), offering high wear resistance (Vickers 16 GPa), chemical inertness, and thermal stability up to 1600°C. Our precision machining capabilities achieve inner diameter as small as 0.2mm, with straightness of 0.005mm and concentricity of 0.01mm, ensuring consistent flow and precise fluid/gas distribution. The nozzle features a smooth inner bore with surface finish Ra0.1, minimizing flow resistance and reducing clogging. Orifice diameters from 0.2mm to 5.0mm, with custom geometries including straight, tapered, or multi-orifice outlets. Each nozzle is inspected dimensionally and checked for flow uniformity.
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High-Purity Alumina Ceramic Grinding Plate for Precision Lapping
St.Cera’s ceramic grinding plate is manufactured from 99.8% high-purity alumina (Al₂O₃) for precision lapping and grinding applications. Our precision grinding capability achieves flatness of 0.003mm, parallelism of 0.002mm, and surface finish of Ra0.1, ensuring uniform material removal across the entire plate surface. The plate offers excellent wear resistance (Vickers 16 GPa), high flexural strength (361 MPa), and thermal stability up to 800°C. Available in round formats up to 600mm diameter and rectangular plates up to 1500mm length. Grooved surfaces (groove width 0.5–2.0mm) are available for slurry distribution in lapping processes. Each plate is inspected with laser interferometer and supplied with a precision measurement report.
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High-Purity Alumina Ceramic End Effector for Wafer Handling Robots
St.Cera’s alumina ceramic end effector is precision machined from 99.8% high-purity Al₂O₃ using advanced 5-axis CNC grinding equipment. Our manufacturing capabilities include precision grinding machines and CNC machining centers, enabling complex geometries with high precision. The end effector features a thin profile (as thin as 1.5 mm) with a tapered leading edge for smooth wafer insertion. The material provides high stiffness (Young’s modulus 380 GPa), excellent wear resistance, and thermal stability up to 800°C. Each unit is precision ground to achieve flatness of 0.003mm, parallelism of 0.002mm, and surface finish of Ra0.1, ensuring consistent wafer contact and particle-free operation in semiconductor FAB environments. Available in lengths from 150 mm to 450 mm, with custom tip geometries (edge grip, Bernoulli, flat) and mounting flanges to fit OEM robots. Surface finish options include lapped, polished, or ESD dissipative coating (10⁶–10⁹ Ω/sq).
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Alumina Vacuum Chuck for Precision Dicing & Grinding
St.Cera’s alumina vacuum chuck is manufactured from 99.8% high-purity Al₂O₃ with precision-machined vacuum grooves. Our precision grinding capability achieves flatness of 0.003mm and parallelism of 0.002mm, ensuring warp-free wafer fixation during dicing, backside grinding, and inspection. The material offers high flexural strength (361 MPa), hardness (16 GPa), and thermal stability up to 800°C. Available in round formats up to 600mm outer diameter (OD) and rectangular shapes up to 1500mm length. Vacuum grooves are custom-designed (concentric, radial, or grid patterns) to suit specific process requirements. Each chuck is inspected with laser interferometer and supplied with a flatness verification report.
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Metal-Backed Porous SiC Vacuum Chuck for Warped & Thin Wafer Handling
St.Cera’s metal based ceramic vacuum chuck combines a porous silicon carbide (SiC) ceramic layer with a precision-machined metal base (aluminum or stainless steel). The porous SiC material (blue-black, porosity 35–40%, pore size 20–30 μm, permeability 60 ml/cm²·min) provides uniform, gentle vacuum distribution across the entire wafer surface, eliminating edge marking and enabling non-contact support for thin (≤100 μm) or warped wafers. The SiC layer offers low thermal expansion (3.5×10⁻⁶/℃), thermal stability up to 1000°C, and moderate flexural strength (32–35 MPa). The metal base adds structural rigidity, easy mounting via threaded holes, and protection against brittle fracture. This chuck is ideal for backside grinding, dicing, and high-temperature wafer processing where uniform vacuum and thermal compatibility are critical.
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High-Purity Alumina Ceramic Plate – for Insulation & High-Temperature Fixtures
St.Cera’s ceramic plate is manufactured from 99.8% high-purity alumina (Al₂O₃), offering high dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and excellent wear resistance. Plates are precision lapped to achieve flatness ≤5 μm over 100 mm and surface roughness Ra ≤0.4 μm. Available in standard thicknesses from 1 mm to 20 mm, custom sizes up to 500×500 mm. Used as electrical insulators, heater bases, chamber liners, and vacuum chuck substrates.
