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Custom Alumina Ceramic Parts for Semiconductor & Industrial Equipment
St.Cera manufactures custom ceramic parts from 99.8% high-purity alumina (Al₂O₃) according to customer drawings. Our facility is equipped with precision grinding machines and CNC machining centers, enabling the production of complex ceramic components with high precision. Typical parts include insulators, bearing balls, seal rings, bushings, custom fixtures, and complex geometries. Our manufacturing capabilities support
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Alumina Ceramic Nozzle for High-Temperature Gas/Fluid Injection
St.Cera’s ceramic nozzle is precision machined from 99.8% high-purity alumina (Al₂O₃), offering high wear resistance (Vickers 16 GPa), chemical inertness, and thermal stability up to 1600°C. Our precision machining capabilities achieve inner diameter as small as 0.2mm, with straightness of 0.005mm and concentricity of 0.01mm, ensuring consistent flow and precise fluid/gas distribution. The nozzle features a smooth inner bore with surface finish Ra0.1, minimizing flow resistance and reducing clogging. Orifice diameters from 0.2mm to 5.0mm, with custom geometries including straight, tapered, or multi-orifice outlets. Each nozzle is inspected dimensionally and checked for flow uniformity.
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High-Purity Alumina Ceramic Grinding Plate for Precision Lapping
St.Cera’s ceramic grinding plate is manufactured from 99.8% high-purity alumina (Al₂O₃) for precision lapping and grinding applications. Our precision grinding capability achieves flatness of 0.003mm, parallelism of 0.002mm, and surface finish of Ra0.1, ensuring uniform material removal across the entire plate surface. The plate offers excellent wear resistance (Vickers 16 GPa), high flexural strength (361 MPa), and thermal stability up to 800°C. Available in round formats up to 600mm diameter and rectangular plates up to 1500mm length. Grooved surfaces (groove width 0.5–2.0mm) are available for slurry distribution in lapping processes. Each plate is inspected with laser interferometer and supplied with a precision measurement report.
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High-Purity Alumina Ceramic End Effector for Wafer Handling Robots
St.Cera’s alumina ceramic end effector is precision machined from 99.8% high-purity Al₂O₃ using advanced 5-axis CNC grinding equipment. Our manufacturing capabilities include precision grinding machines and CNC machining centers, enabling complex geometries with high precision. The end effector features a thin profile (as thin as 1.5 mm) with a tapered leading edge for smooth wafer insertion. The material provides high stiffness (Young’s modulus 380 GPa), excellent wear resistance, and thermal stability up to 800°C. Each unit is precision ground to achieve flatness of 0.003mm, parallelism of 0.002mm, and surface finish of Ra0.1, ensuring consistent wafer contact and particle-free operation in semiconductor FAB environments. Available in lengths from 150 mm to 450 mm, with custom tip geometries (edge grip, Bernoulli, flat) and mounting flanges to fit OEM robots. Surface finish options include lapped, polished, or ESD dissipative coating (10⁶–10⁹ Ω/sq).
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Alumina Vacuum Chuck for Precision Dicing & Grinding
St.Cera’s alumina vacuum chuck is manufactured from 99.8% high-purity Al₂O₃ with precision-machined vacuum grooves. Our precision grinding capability achieves flatness of 0.003mm and parallelism of 0.002mm, ensuring warp-free wafer fixation during dicing, backside grinding, and inspection. The material offers high flexural strength (361 MPa), hardness (16 GPa), and thermal stability up to 800°C. Available in round formats up to 600mm outer diameter (OD) and rectangular shapes up to 1500mm length. Vacuum grooves are custom-designed (concentric, radial, or grid patterns) to suit specific process requirements. Each chuck is inspected with laser interferometer and supplied with a flatness verification report.
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Metal-Backed Porous SiC Vacuum Chuck for Warped & Thin Wafer Handling
St.Cera’s metal based ceramic vacuum chuck combines a porous silicon carbide (SiC) ceramic layer with a precision-machined metal base (aluminum or stainless steel). The porous SiC material (blue-black, porosity 35–40%, pore size 20–30 μm, permeability 60 ml/cm²·min) provides uniform, gentle vacuum distribution across the entire wafer surface, eliminating edge marking and enabling non-contact support for thin (≤100 μm) or warped wafers. The SiC layer offers low thermal expansion (3.5×10⁻⁶/℃), thermal stability up to 1000°C, and moderate flexural strength (32–35 MPa). The metal base adds structural rigidity, easy mounting via threaded holes, and protection against brittle fracture. This chuck is ideal for backside grinding, dicing, and high-temperature wafer processing where uniform vacuum and thermal compatibility are critical.
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High-Purity Alumina Ceramic Plate – for Insulation & High-Temperature Fixtures
St.Cera’s ceramic plate is manufactured from 99.8% high-purity alumina (Al₂O₃), offering high dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and excellent wear resistance. Plates are precision lapped to achieve flatness ≤5 μm over 100 mm and surface roughness Ra ≤0.4 μm. Available in standard thicknesses from 1 mm to 20 mm, custom sizes up to 500×500 mm. Used as electrical insulators, heater bases, chamber liners, and vacuum chuck substrates.
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Precision Alumina Ceramic Location Rod for Semiconductor Fixtures
St.Cera’s ceramic location rod is precision ground from 99.8% high-purity alumina (Al₂O₃). It provides high hardness (16 GPa), excellent wear resistance, and dimensional stability. Diameter tolerances as tight as ±0.005 mm, length up to 150 mm. The rod surface is lapped to Ra ≤0.2 μm for smooth insertion and removal. Used as alignment pins, dowel pins, or positioning stops in semiconductor process fixtures, wafer cassettes, and inspection equipment.
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High-Strength Zirconia Ceramic Rod – for Precision Shafts & Punches
St.Cera’s zirconia ceramic rod is precision ground from yttria-stabilized ZrO₂. It offers exceptional flexural strength (1000 MPa), fracture toughness (5–8 MPa·m¹/²), and Vickers hardness (13 GPa). The rod has a black or white appearance, density 6.03 g/cm³, and zero porosity. Diameters from 1 mm to 50 mm, length up to 200 mm, with tolerance as tight as ±0.005 mm. Surface finish lapped to Ra ≤0.2 μm. Ideal for high-wear applications such as plungers, shafts, dowel pins, and cutting tool blanks.
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Yttria-Stabilized Zirconia Ceramic Parts – High Toughness & Wear Resistance
St.Cera manufactures custom zirconia ceramic parts using yttria-stabilized ZrO₂ (Y-TZP). This material offers exceptional flexural strength (1000 MPa), high fracture toughness (5–8 MPa·m¹/²), and Vickers hardness of 13 GPa. Density is 6.03 g/cm³, with zero water absorption. Parts can be supplied in white or black color. Zirconia’s unique transformation toughening mechanism provides excellent resistance to crack propagation, making it ideal for components subject to impact, thermal shock, or high stress. Typical parts include valve seats, pump plungers, fiber guide pins, cutting tools, and wear-resistant bushings.
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ST.CERA Customized 99.5% Alumina Ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. Be made of high-purity ceramic powder, the ceramic parts is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries with its features like high temperature resistance, corrosion resistance, abrasion resistance and insulation.
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ST.CERA Customized 99.5% Alumina Ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries with its features like high temperature resistance, corrosion resistance, abrasion resistance and insulation.
