Insulated Alumina Ceramic Arm Semiconductor Equipment Components

Short Description:

Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.

For the guides, adopted a soft material that does not damage the wafer.

Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.

Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.

Mounting sensors, screws and brackets is available as an option.

Designed to be used in atmosphere