-
ST.CERA Customized Alumina Ceramic End Effector Wafer Handling
ST.CERA offers ESD coating and ESD ceramic material End Effector / Handling Arm with a built-in hollow channel. We specialize in a technique that forms a vacuum air channel inside a single piece of material without using adhesive.
There is no risk of contaminant, outgassing, or particles. ST.CERA’s vacuum End Effector / Handling Arm with special coating technology is electrical insulated. We can also provide ESD ceramic material that is electrical insulated without any coating.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃. -
ST.CERA Customized Alumina Ceramic Vacuum End Effector
This is a tray-type ceramic End Effector / Handling Arm used under a vacuum condition.
Ceramic End Effector / Handling Arm is “more heat-resistant”, “less deflective”, and “lighter” in weight as compared to the metal ones.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
-
ST.CERA Customized Alumina Ceramic End Effector
ST.CERA offers ESD coating and ESD ceramic material End Effector Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
-
ST.CERA Customized ESD Ceramic end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time
-
ST.CERA Customized Alumina Ceramic gripping end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
-
ST.CERA Customized Alumina Ceramic tray end effector
This is a tray-type ceramic End Effector / Handling Arm used under a vacuum condition.
Ceramic End Effector / Handling Arm is “more heat-resistant”, “less deflective”, and “lighter” in weight as compared to the metal ones.
-
ST.CERA Customized Alumina Ceramic vacuum end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
-
ST.CERA Customized Alumina Ceramic Bernoulli end effector
As a leading manufacturer of ceramic End Effector / Handling Arm, we have developed an unconventional End Effector / Handling Arm that responds to that market’s needs. Bernoulli’s Principle-based ceramic End Effector / Handling Arm which can levitate and transport the wafer via airflow with minimal peripheral contact.
