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High-Purity Alumina Ceramic End Effector for Wafer Handling Robots
St.Cera’s alumina ceramic end effector is precision machined from 99.8% high-purity Al₂O₃ using advanced 5-axis CNC grinding equipment. Our manufacturing capabilities include precision grinding machines and CNC machining centers, enabling complex geometries with high precision. The end effector features a thin profile (as thin as 1.5 mm) with a tapered leading edge for smooth wafer insertion. The material provides high stiffness (Young’s modulus 380 GPa), excellent wear resistance, and thermal stability up to 800°C. Each unit is precision ground to achieve flatness of 0.003mm, parallelism of 0.002mm, and surface finish of Ra0.1, ensuring consistent wafer contact and particle-free operation in semiconductor FAB environments. Available in lengths from 150 mm to 450 mm, with custom tip geometries (edge grip, Bernoulli, flat) and mounting flanges to fit OEM robots. Surface finish options include lapped, polished, or ESD dissipative coating (10⁶–10⁹ Ω/sq).
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ST.CERA Customized Alumina Ceramic Bernoulli end effector
As a leading manufacturer of ceramic End Effector / Handling Arm, we have developed an unconventional End Effector / Handling Arm that responds to that market’s needs. Bernoulli’s Principle-based ceramic End Effector / Handling Arm which can levitate and transport the wafer via airflow with minimal peripheral contact.
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ST.CERA Customized ESD Ceramic end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time
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ST.CERA Customized Alumina Ceramic gripping end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
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ST.CERA Customized Alumina Ceramic tray end effector
This is a tray-type ceramic End Effector / Handling Arm used under a vacuum condition.
Ceramic End Effector / Handling Arm is “more heat-resistant”, “less deflective”, and “lighter” in weight as compared to the metal ones.
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ST.CERA Customized Alumina Ceramic vacuum end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
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ST.CERA Customized Alumina Ceramic End Effector
ST.CERA offers ESD coating and ESD ceramic material End Effector Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Alumina Ceramic Vacuum End Effector
This is a tray-type ceramic End Effector / Handling Arm used under a vacuum condition.
Ceramic End Effector / Handling Arm is “more heat-resistant”, “less deflective”, and “lighter” in weight as compared to the metal ones.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Alumina Ceramic End Effector Wafer Handling
ST.CERA offers ESD coating and ESD ceramic material End Effector / Handling Arm with a built-in hollow channel. We specialize in a technique that forms a vacuum air channel inside a single piece of material without using adhesive.
There is no risk of contaminant, outgassing, or particles. ST.CERA’s vacuum End Effector / Handling Arm with special coating technology is electrical insulated. We can also provide ESD ceramic material that is electrical insulated without any coating.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃. -
Alumina Ceramic End Effector Semiconductor Equipment Components
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere.
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Customized CNC Machining of St.Cera Ceramic End Effector
ST.CERA offers a vacuum ceramic End Effector / Handling Arm with a built-in hollow channel. We specialize in a technique that forms a vacuum air channel inside a single piece of material without using adhesive.
There is no risk of contaminant, outgassing, or particles. ST.CERA’s vacuum End Effector / Handling Arm with built-in channel are durable and can be used at high temperatures. Moreover, our manufacturing cost can be reduced by eliminating unnecessary assembly.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Alumina Anti-Static Ceramic End Effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
